The installations for micro and nano patterning have a wide variety of machining and structuring equipment suitable for structures ranging in size from a few nanometres up to larger microstructured components. The range of materials that can be worked covers the material classes of metals, ceramics, polymers, organics biomaterials, glass and silicon. Micro and nanostructures which can be fabricated within EUMINAfab are suitable for wide range of application areas and include mechanical and micro fluidic components, high aspect ratio structures, moulds and stamps for replication tools, lenses and X-ray gratings to name but some.

Single and multi-layers and films with thicknesses as low as 10 nm can be formed by sputtering methods. Highly regular nanostructures of emitting nanocrystals, metallic and ceramic nanoclusters can be created by exploiting self-assembly methods. Light emitting devices can also be fabricated by layer by layer deposition. Etching methods specially adapted for noble metals which have applications e. g. in heating elements, Pt electrodes and temperature sensors.

Short series microcomponents from polymers, metal or ceramics can be produced by hot embossing or micro-injection moulding. High geometric accuracies and small tolerances can be achieved e. g. by using LIGA fabricated mould inserts. Metal lines can be printed on glass or metal substrates, both over a large area and using several materials, forming e. g. conductive structures for high and low temperature applications. High resolution and high aspect ratio structures can be formed by reactive ion etching. In addition to silica these technologies are suitable for polymers, metals and glass.

Characterisation methods are available for a broad range of materials and structures and allow for electro-optical characterisation of particles or surfaces, microscopic methods enable the imaging of particles and demonstration of the atomic arrangement within particles. Metrological services are available for systems containing silica, polymers, metals, ceramics or glass.