The installations for micro and nano patterning have a wide variety of machining and structuring equipment suitable for structures ranging in size from a few nanometres up to larger microstructured components. The range of materials that can be worked covers the material classes of metals, ceramics, polymers, organics biomaterials, glass and silicon.

Micro and nanostructures which can be fabricated within EUMINAfab are suitable for wide range of application areas and include mechanical and micro fluidic components, high aspect ratio structures, moulds and stamps for replication tools, lenses and X-ray gratings to name but some.

Installation

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