Short series microcomponents from polymers, metal or ceramics can be produced by hot embossing or micro-injection moulding. High geometric accuracies and small tolerances can be achieved e. g. by using LIGA fabricated mould inserts. Metal lines can be printed on glass or metal substrates, both over a large area and using several materials, forming e. g. conductive structures for high and low temperature applications. High resolution and high aspect ratio structures can be formed by reactive ion etching. In addition to silica these technologies are suitable for polymers, metals and glass.